The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 1997
Filed:
Jun. 16, 1995
Applicant:
Inventors:
Richard Pepi, Pourrieres, FR;
Michel Garcia, Les Milles, FR;
Robert Meyer, Saint Nazaire les Eymes, FR;
Assignee:
Pixel International S.A., Rousset, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20419226 ; 20429811 ; 20429825 ; 20429826 ;
Abstract
A device for sputtering a metallic material on a plate comprises a vacuum chamber provided with a linear conveyor carrying at least one plate, the plate surface to be processed being turned downward. At least two sputtering sources are disposed under the conveyor, perpendicularly to its moving direction. Each source is associated with a collimator. The sputtering sources and their associated collimators are disposed to coat the whole width of the plate.