The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 1997
Filed:
Mar. 17, 1995
Benjamin R Strong, Jr, Sunnyvale, CA (US);
Brent D Elliot, Santa Clara, CA (US);
Frank R Balma, San Jose, CA (US);
Insync Systems, Inc., Santa Clara, CA (US);
Abstract
A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.