The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 1997

Filed:

Jan. 05, 1995
Applicant:
Inventors:

Yoshinobu Matsuda, Tsukuba, JP;

Masahiko Hata, Tsuchiura, JP;

Noboru Fukuhara, Tsukuba, JP;

Toshio Ishihara, Tsukuba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117 89 ; 117104 ; 117954 ; 437105 ;
Abstract

A process for crystal growth of III-V group compound semiconductor, which comprises pyrolyzing, in a gas phase, a material consisting of an organometallic compound and/or a hydride in the presence of an organic compound containing an oxygen atom-carbon atom direct bond, used as a dopant to grow a III-V group compound semiconductor crystal layer containing at least aluminum, of high electric resistance. Said process can grow a compound semiconductor layer of high electric resistance by the use of a dopant which enables the independent controls of oxygen concentration and aluminum concentration and which has a small effect of oxygen remaining.


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Matsuda, Yoshinobu. (1997). Process for crystal growth of iii-v group compound semiconductor (U.S. Patent No. 5603764). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5603764

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