The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 1997
Filed:
Feb. 15, 1995
Carlo Grilletto, San Carlos, CA (US);
David G Love, Pleasanton, CA (US);
Fujitsu Limited, , JP;
Abstract
A method and apparatus for filling small diameter, high aspect ratio via openings with a plating solution are disclosed. An apparatus according to the invention comprises a sealable chamber for receiving one or more a multichip module substrate comprising via openings to be plated. A vacuum pump is used to evacuate the chamber after the substrate(s) are positioned therein and the chamber has been sealed. Plating solution is then introduced into the chamber to immerse the substrate(s), and the solution is pressurized, forcing the liquid into the via openings. In one preferred embodiment, the chamber comprises two subchambers separated by a flexible wall. After the subchamber holding the substrate(s) has been evacuated and filled with plating solution, the other subchamber is pressurized, as with compressed air, such that a force is applied to the flexible wall creating hydrostatic pressure within the first subchamber.