The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1997
Filed:
Dec. 19, 1994
Isao Suzuki, Tokyo, JP;
Taisei Amano, Tokyo, JP;
MKS Japan, Inc., Tokyo, JP;
Abstract
A mass flow controller includes a photoelectric transducer for receiving information through an optical fiber and an electro-optical transducer for transmitting the result of detection of the mass flow through the optical fiber, thereby transmitting and receiving information through the optical fiber. Accordingly, the transmission and reception of data between the host computer and the mass flow controller performed through the optical fiber are not affected by electro-magnetic noise. Further, the mass flow controller can include a correction device responsive to a command from the host computer for correcting the result of a detection, to thereby accurately process the result of the detection because the result of the detection is corrected as required and then transmitted to the host computer as the correct data.