The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 1997

Filed:

Aug. 24, 1995
Applicant:
Inventors:

Robert A Lux, Toms River, NJ (US);

James A Harvey, Apex, NC (US);

Arthur Tauber, Elberon, NJ (US);

Steven C Tidrow, Eatontown, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; H05B / ;
U.S. Cl.
CPC ...
427586 ; 427561 ; 427583 ; 427596 ;
Abstract

An ablation process by which fused deposits of silicon particles are accuated on a substrate of selected material in accordance with whether microclusters of spherical configurations or microfilaments of cylindrical configurations are to be fabricated. Silicon ablation is accomplished in an inert gas atmosphere with an excimer laser that generates light pulses of which the wavelength and frequency are controlled to fix the energy level thereof. The pressure of the inert gas atmosphere is also controlled in accordance with whether microclusters or microfilaments are to be fabricated.


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