The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 1997
Filed:
Jul. 18, 1994
Wataru Okase, Sagamihara, JP;
Tokyo Electron Kabushiki Kaisha, Tokyo-To, JP;
Tokyo Electron Tohoku Kabushiki, Iwate-Ken, JP;
Abstract
The workpiece, which is horizontally held in the treatment chamber, is heated by the planar heat generating members disposed on the upper and lower surfaces of the treatment chamber and controlled to predetermined temperature through respective heat equalizing members. Thus, the workpiece can be quickly heated with an equal temperature distribution and high repeatability on the entire surface regardless of the diameter thereof. Further, a stream that is vertically symmetrical is obtained due to the shapes of the shoulder portions. Thus, since an eddy current and a turbulence that tend to take place upon supply of a process gas is prevented, the process gas can be equally contacted to the entire surface of the workpiece.