IDiyas

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5591492 B1

PDFFull Text
Date of Patent:
Jan. 07, 1997

Filed:

Feb. 28, 1995

Process for forming and etching a film to effect specific crystal growth

Applicant:
Inventors:

Yutaka Hirai, Hikone, JP;

Jinsho Matsuyama, Nagahama, JP;

Shigeru Shirai, Nagahama, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Fitzpatrick, Cella, Harper & Scinto

Primary Examiner:

Marianne Padgett

Int. Cl.
CPC ...
B05D / ; H05H / ; C30B / ;
U.S. Cl.
CPC ...
427563 ; 427574 ; 427572 ; 427553 ; 427554 ; 117 92 ; 117 99 ; 117103 ;
Abstract

A process for forming a deposited film comprises the steps of:

Find Patent Forward Citations

Loading…