The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 1997

Filed:

Oct. 27, 1995
Applicant:
Inventors:

Steven V Morgan, Windsor, CA (US);

Johan Vanderstraeten, Deinze, BE;

Erwin Vanderstraeten, Deinze, BE;

Guy Gobin, Deinze, BE;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429822 ;
Abstract

An apparatus to releasably affix a rotating cylindrical magnetron target to a spindle utilizes a threaded spindle collar engaging threads on the outside surface of the target, with a single water-to-vacuum seal located at the target and spindle interface. The threads may be removable from the target, enabling efficient assembly/disassembly and recycling.


Find Patent Forward Citations

Morgan, Steven. (1997). Apparatus for affixing a rotating cylindrical magnetron target to a (U.S. Patent No. 5591314). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5591314

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…