The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 1997
Filed:
Apr. 28, 1995
Jay J Seaton, Austin, TX (US);
Michael Allen, Austin, TX (US);
Donald Landis, Hollis, NH (US);
Patrick Lee, Austin, TX (US);
David Linzy, Merrimack, NH (US);
Susan B Luca, Hollis, NH (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury.RTM. MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and is used to enable such functions as recipe directory editing, recipe downloading, event log searching, data capture file data graphing and processor status viewing. A third subset of the spray processor host system computers comprises a bridge computer for providing a communications link between the supervisor computers and a upstream host computer outside the spray processor host system, for example, a lot scheduling or material flow control computer.