The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 1996

Filed:

Oct. 14, 1992
Applicant:
Inventor:

Toshio Baba, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
257105 ; 257 25 ; 257 30 ; 257 35 ; 257104 ; 257106 ;
Abstract

A tunnel transistor comprises a semiconductor film (27) between a gate isolating film (17) and parts of first (13) and second (15) semiconductor layers which are formed in a substrate (11) to serve as source and drain regions with a spacer region left therebetween and covered with the semiconductor film. The gate isolating film is over the part of the first semiconductor layer and is made of either an insulating material or a semiconductor material, each of which materials should have a wider forbidden bandwidth than a semiconductor material of the semiconductor film, such as silicon dioxide, silicon nitride, or aluminium nitride, or gallium phosphide for silicon, or AlGaAs fox gallium arsenide. A source electrode is formed on an uncovered area of the first semiconductor layer. The semiconductor film forms a tunnel junction with the first semiconductor layer and an ohmic junction with the second semiconductor layer, which junction may be either a homojunction or a heterojunction. The transistor can be of a submicron order and is operable as either of depletion and enhancement types of producing a great drain current at a high speed when supplied with no netavite gate voltage and with a gate voltage.


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