The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1996
Filed:
Aug. 08, 1995
Teruaki Nagahara, Itami, JP;
Masahiro Yamamoto, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor acceleration sensor capable of sensing acceleration in two orthogonal directions has an acceleration sensor beam which is provided with a diaphragm 9 formed in the reverse side thereof. The diaphragm is narrowed by, for example, etching also in Z-axis direction which is the widthwise direction of the acceleration sensor beam, so that the acceleration sensor beam is easily deflectable also in the Z-axis direction. A first group of gauge resistors forming a bridge circuit are arranged on a first side of the diaphragm 9 at portions adjacent to the pedestal which cantilevers the acceleration sensor beam. A second group of resistors forming another bridge circuit are arranged on the first side of the diaphragm 9 at portions adjacent to the corners of the diaphragm. Alternatively, the second group of gauge resistors may be arranged on a narrowed portion of the acceleration sensor beam, formed at a location other than that of the diaphragm. The acceleration sensor is capable of detecting acceleration in two orthogonal directions, thus making it possible to reduce the number of acceleration sensors in a system which requires acceleration detection in two or three directions.