The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 1996
Filed:
Jul. 21, 1995
Akihiko Ochiai, Kanagawa, JP;
Sony Corporation, , JP;
Abstract
A process for fabricating a semiconductor device comprising multilevel interconnection, comprising: forming a trench on the surface of a first substrate to provide an element isolating region; forming a first insulating film on the surface of the trench and the first substrate; forming a first interconnection layer on the surface of the first insulating film; forming a second insulating film on the surface of the first substrate in such a manner that the first interconnection layer is covered and the trench is filled; forming a second interconnection layer on the second insulating film; forming sequentially in this order, a third insulating film and an adhesion layer-on the surface of said second insulating film covering the second interconnection layer; bonding a second substrate on the surface of the adhesion layer; planarizing the back of the first substrate by removing the first substrate from the back side thereof and the bottom of the trench; and forming a fourth insulating film on the back of the first substrate, and forming a third interconnection layer on the fourth insulating film. The process according to the present invention enables a semiconductor device comprising a multilevel interconnection with small step height.