The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 1996
Filed:
Dec. 07, 1994
Applicant:
Inventors:
Assignee:
Nippon Paint Co., Ltd., Osaka-fu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
4302701 ; 430326 ; 430910 ; 522149 ;
Abstract
Disclosed is a positive type resist composition which can form a good pattern by subjecting a resist layer to plural exposures and developments, which results in excellent adhesion between the resist layer and a substrate. The composition comprises: (a) a polymer having an acid value of 2 to 200, prepared from 20 to 94% by weight of a t-butyl ester of a .alpha.,.beta.-ethylenically unsaturated carboxylic acid, 5 to 79% by weight of a (meth)acrylate of the formula: