The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 1996

Filed:

Jul. 29, 1994
Applicant:
Inventors:

Seok-Won Lee, Seoul, KR;

Myoung-Jin Kim, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; H01L / ; H04R / ;
U.S. Cl.
CPC ...
359224 ; 359291 ; 359295 ; 359846 ; 359855 ; 359900 ; 310328 ; 310366 ; 29 2535 ;
Abstract

An array of M .times.N electrostrictive actuated mirrors for use in an optical projection system manufactured using the inventive method, comprising: an active matrix including a substrate and an array of M.times.N connecting terminals thereon; an array of M.times.N electrostrictive actuators, wherein each of the actuators includes an electrostrictive member having a top and a bottom surfaces, the top surface being separated by a trench thereby creating first top surface and a second top surface, a first electrode located on the bottom surface, a pair of second electrodes, each of the of second electrodes placed on the first and second top surfaces, respectively, and a pair of insulating layers, each covering the first and second top surface, respectively, including the second electrode placed thereon; an array of M.times.N hinges, wherein each of the M.times.N hinges is provided with a flat top surface and a bottom surface having a protrusion mounted on the top of each actuators; an array of M.times.N connecting terminals, wherein each of the connecting terminals is used for electrically connecting each of the first electrodes with the active matrix; and an array of M.times.N mirrors, wherein each of the M.times.N mirrors is mounted on the top surface of each of the M.times.N hinges.


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