The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 1996
Filed:
Aug. 18, 1993
Applicant:
Inventors:
Craig J McLachlan, Melbourne Beach, FL (US);
Anthony L Rivoli, Palm Bay, FL (US);
Assignee:
Harris Corporation, Melbourne, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257506 ; 437 61 ; 437 62 ; 437 63 ; 437225 ; 437235 ; 437974 ;
Abstract
A silicon on insulator substrate 8 provides islands of silicon 18 of uniform thickness by using a trench etch process and a silicon nitride layer 20 to provide a thickness control and polish stop for the silicon islands 18.
Quick Actions:
McLachlan, Craig. (1996). Sub-micron bonded soi by trench planarization (U.S. Patent No. 5585661). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5585661
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile