The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 1996
Filed:
Jan. 02, 1996
Masashige Mitsuhashi, Tokyo, JP;
Hideyuki Ono, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A surface polishing apparatus includes a disk-like polishing tool, a polishing solution spray mechanism, and a polishing solution suction mechanism. The polishing tool has a work surface to which a polishing solution is supplied and against which a workpiece is pressed. The polishing tool is driven/rotated to surface-polish the workpiece. The polishing solution supply mechanism is disposed on the upstream side of the workpiece in the rotational direction of the polishing tool to supply a polishing solution to the work surface of the polishing tool. The polishing solution suction mechanism is disposed on the downstream side of the workpiece in the rotational direction of the polishing tool to draw and recover the polishing solution on the work surface of the polishing tool.