The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 1996

Filed:

Dec. 02, 1994
Applicant:
Inventors:

Motohiro Yamane, Tokyo, JP;

Satoshi Fukuoka, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359393 ; 359391 ; 359392 ;
Abstract

A multi-axes stage including a table for mounting an optical component having a plurality of optical paths; and first and second actuators for vertically movably supporting the table, the actuators having a control device for adjusting the vertical movement of the table by each actuator separately, and for controlling the movement of the table in at least one of the rotating direction about the optical paths and the vertical direction.


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