The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 1996
Filed:
Jul. 06, 1994
Applicant:
Inventor:
Kazumi Haga, Chofu, JP;
Assignee:
New Creation Co., Ltd., , JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ; G01B / ; G01B / ;
U.S. Cl.
CPC ...
356129 ; 356359 ; 356362 ; 356371 ; 356237 ; 356445 ;
Abstract
In an optical inspecting apparatus, first, a sample is illuminated with light. Then, an optical element causes light reflected from the sample or light transmitted through the sample to be focused, to thereby permit same to pass through an aperture stop arranged on a back focal plane or in its vicinity of the optical element. A telecenttic system converts the light having passed through the aperture stop into a parallel light. An image on the air formed by the telecentric system is viewed for inspection of the sample surface.