The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1996
Filed:
Jun. 20, 1994
Applicant:
Inventors:
Assignee:
Sanyo Electric Co. Ltd., Moriguchi, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
21912169 ; 21912176 ; 437173 ; 437-2 ; 437-4 ; 136244 ;
Abstract
A method of removing a prescribed portion of a semiconductor film or a metal film involves irradiating the prescribed portion to be removed with a first energy beam, and then with a second energy beam. The energy densities and beam widths of the first and second energy beams are each separately controlled or selected to avoid damaging an underlayer under the film and to reduce or avoid deformation of a periphery around the removed portion.