The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 1996
Filed:
Jun. 28, 1995
Applicant:
Inventor:
Chi-Nan Chen, Hsinchu, TW;
Assignee:
Electronics Research & Service Organization, Hsinchu, TW;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; H01J / ; H01P / ;
U.S. Cl.
CPC ...
1187 / ; 31511141 ; 333242 ; 333 / ; 1187 / ;
Abstract
A corrugated waveguide is disclosed comprising a cylindrical body with outer and inner surfaces. The inner surface is provided with plurality of ridges uniformly spaced around the inner surface. Presence of 2n ridges secures the formation of microwaves with stable TE.sub.n1 modes where n is an integer and n>1. Disclosed also is an electron cyclotron resonance system for plasma processing of which system the corrugated waveguide described in the above is a part.