The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 1996
Filed:
Jun. 16, 1994
Kazuhide Fujita, Osaka, JP;
Nitto Denko Corporation, Osaka, JP;
Abstract
A probe structure for measuring electric characteristics of a semiconductor element containing a first electrically conductive circuit board having a structure wherein the contact portions, which are contacted with the terminals of a material to be tested, are disposed in a first insulator in the direction of the thickness thereof so as to penetrate the insulator and are connected to a first electrically conductive wiring formed between the first insulator and a second insulator. The probe structure also contains a second electrically conductive circuit board having a coefficient of thermal expansion which is the same as or similar to that of the material to be tested and having a structure wherein the first electrically conductive wiring is connected to a second electrically conductive wiring which, in turn, is connected to an electric tester for testing the electric characteristics of the material to be tested. The first electrically conductive circuit board is electrically connected to the second electrically conductive circuit board, and an elastic body is disposed between the first electrically conductive circuit board and the second electrically conductive circuit board.