The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 1996
Filed:
May. 26, 1995
Applicant:
Inventors:
Dane H Anderberg, Phoenix, AZ (US);
Lewis C Barnett, Tempe, AZ (US);
Assignee:
Advanced Semiconductor Materials America, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03B / ;
U.S. Cl.
CPC ...
65102 ; 65 71 ; 65106 ; 65107 ; 65109 ; 65111 ; 65120 ; 65256 ; 65271 ; 65273 ; 65285 ; 65287 ; 65289 ; 65290 ; 65291 ; 65302 ; 425110 ; 425111 ; 425112 ; 425117 ;
Abstract
A method of making a quartz dome for a reactor chamber from a substantially flat quartz disk. The quartz disk is placed on a graphite ring which is rotated. The quartz disk is heated until the disk is softened slightly and it begins to slump. The softened portion of the disk is drawn by a change in pressure to contact a fixed wiper blade. The wiper blade controls the size and shape of the deformation of the quartz disk to form the dome surface.