The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 1996

Filed:

Mar. 28, 1994
Applicant:
Inventors:

Eiji Mutoh, Wako, JP;

Akihiro Niiya, Wako, JP;

Shigemitsu Ogawa, Tokyo, JP;

Fujito Tanaka, Tokyo, JP;

Munenori Tsuchiya, Tokyo, JP;

Daiji Uehara, Tokyo, JP;

Kenji Nagasawa, Tokyo, JP;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73724 ; 73723 ;
Abstract

A pressure sensor based on electrostatic capacity method is disclosed, which comprises the main body of a pressure sensing element having one end surface as a pressured face and the other end surface as a back, for detecting the pressure of a measurement fluid acting on the pressured face, a seal member, a measure pattern on the back, and a one-chip IC. For size reduction, an input-output policy is provided near the main body of the pressure sensing element, and it effects input and output with respect to the pressure sensing element main body while preventing external disturbances and improving the accuracy of measurement.


Find Patent Forward Citations

Loading…