The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 1996
Filed:
Sep. 19, 1995
Kazushi Yokoyama, Kobe, JP;
Norio Suzuki, Kobe, JP;
Kenichi Inoue, Kobe, JP;
Yukito Furukawa, Kobe, JP;
Kabushiki Kaisha Kobe Seiko Sho, Kobe, JP;
Abstract
An X-ray analytical apparatus of a wavelength dispersion type having a construction of essential parts improved using a microprobe of ion beam. An ion beam 10 is controlled to be deflected to scan in a fine region of a sample 3, a characteristic X-ray generated by irradiation of the ion beam is subjected spectro-process by a analyzing element 5 set to a predetermined radius of curvature by a curvature changing mechanism, and an X-ray having a specific wavelength selected by the spectro-process is detected by a proportional counter 7. When an angle of the analyzing element is set by a rotational stage to an incident angle of a specific X-ray determined by a detection element on the sample 3, a wide range of wavelength can be subjected to spectro-measured while the sample 3, the analyzing element 5 and the proportional counter 7 remain fixed in position. Since the proportional counter 7 is provided with a lengthy sensing portion, even if an incident position of the X-ray is changed, measurement can be made while a position of a detector remains fixed. Being a position sensitive type detector, incident position information of the X-ray different according to the wavelength can be removed, and the wavelength and strength of the X-ray can be measured while discriminating each X-ray quantum.