The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 1996
Filed:
Jan. 30, 1995
Applicant:
Inventor:
Toshihisa Tomie, Tsukuba, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250287 ; 250305 ; 250310 ; 378 43 ;
Abstract
An electron spectroscopy apparatus in which pulses of EUV of a prescribed wavelength are generated from plasma produced by pulsed laser beam irradiation of a target containing specific elements, the EUV pulses are used to irradiate a specimen, producing an emission of photoelectrons from the specimen, and the time it takes these photoelectrons to pass along a flight channel is measured and analyzed.