The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 1996
Filed:
Jan. 11, 1995
Applicant:
Inventors:
Alan M Then, Auburn, MA (US);
Steven M Shank, Ithaca, NY (US);
Robert J Soave, Cortland, NY (US);
G William Tasker, West Brookfield, MA (US);
Assignee:
Center for Advanced Fiberoptic Applications, SouthBridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ;
U.S. Cl.
CPC ...
1566431 ; 1566441 ; 1566511 ; 1566571 ; 1566281 ; 216 24 ; 216 33 ; 216 62 ;
Abstract
The present invention discloses a method for constructing a completely micromachined MCP that is activated with thin-film dynodes wherein the interchannel regions are first dry etched in the substrate, resulting in channel pillars. The etched portions of the substrate are then back filled and the channel pillars are thereafter removed to produce a micromachined perforated microchannel plate. The technique may be employed to produce an active element for an integrated image tube or photomultiplier tube.