The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Sep. 11, 1995
Kouichi Ichimura, Yokohama, JP;
Masayuki Nakamoto, Chigasaki, JP;
Masao Obama, Yokosuka, JP;
Hiroshi Masumoto, Yokohama, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
The pressure sensor comprises an air-tight vacuum chamber consisting of a hollow cylinder and a pressure-reception diaphragm. The pressure-reception diaphragm is provided to face a space communicating with a space of an object to be measured. A field emission cold cathode device is provided on the inner surface of the pressure-reception diaphragm. The cold cathode device comprises a lot of emitter electrodes arranged in a matrix manner for emitting electrons, and gate electrodes for drawing out electrons. Two anode electrodes facing the cold cathode device are provided on the inner end surface of the cylinder. The anode electrodes are connected to a differential amplifier for amplifying a variation in output distribution between them.