The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Mar. 23, 1995
Applicant:
Inventors:
Assignee:
Honda Giken Kogyo Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P / ;
U.S. Cl.
CPC ...
7350406 ; 7351403 ; 7320425 ;
Abstract
A multiple-axis gas flow type angular velocity sensor which can accurately and stably detect the magnitude and direction of angular velocities acting in any direction on the sensor main body is provided by performing precision processing on semiconductor substrates using a photo engraving process, which is a process for producing semiconductors, and forming a plurality of pairs of thermosensitive resistor elements, a gas passage and a sensor case by laminating a plurality of semiconductor substrates.