The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Aug. 04, 1994
Applicant:
Inventors:
Clifford L Taylor, Nerstrand, MN (US);
Daniel T Crowley, Owatonna, MN (US);
Assignee:
Viratec Thin Films, Inc., Faribault, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429811 ; 20429822 ;
Abstract
A rotatable magnetron cathode having at least one supported end adapted for attachment to a spindle. At least one dark space shield is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode. If the cathode is cantilever mounted, a floating cone end shield, facing away from the gas discharge and not overlapping the cylindrical cathode wall, is used at the free end.