The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 1996
Filed:
Sep. 27, 1994
Masao Fukutomi, Ibaraki, JP;
Shigeki Aoki, Ibaraki, JP;
Kazunori Komori, Ibaraki, JP;
Toshihisa Asano, Ibaraki, JP;
Yoshiaki Tanaka, Ibaraki, JP;
Hiroshi Maeda, Ibaraki, JP;
Mituba Electric Mfg. Co., Ltd., Gunma, JP;
National Research Institute for Metals, Tokyo, JP;
Abstract
A substrate electrode having a plurality of substrate holders capable of causing a substrate to tilt by an arbitrary angle .theta. relative to the horizontal plane is provided. A plurality of auxiliary electrodes are arranged substantially vertically below the substrate electrode and between the substrate electrode and a target. The substrate electrode and the auxiliary electrodes are electrically insulated from the target. Bias voltage applied to the substrate electrode and the auxiliary electrodes causes the plasma boundary between the cathode dark space and the negative glow to form a cathodic plasma space having a parabolic section, thus forming a crystal-oriented thin film on the substrate surface.