The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 1996
Filed:
Jan. 16, 1996
Isami Sakai, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
In a method for forming silicide films on a silicon substrate being formed thereon with a gate surrounded by gate side walls and being formed therein with diffusion regions, the silicide film being formed on a predetermined region of the silicon substrate at least except for an extremely thin film on the gate side walls. The method comprises the following steps. The silicon substrate is subjected to a collimated sputtering of metal atoms with use of a meshed mask on the silicon substrate surface to deposit a metal film on an entire surface of the silicon substrate, except for an extremely thin film on the vertical walls. The deposited metal film is further subjected to a heat treatment to react the metal film with the diffusion regions to thereby selectively form a metal silicide film at least on the diffusion regions, except for an extremely thin film on the vertical walls.