The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 1996
Filed:
Nov. 30, 1994
Applicant:
Inventor:
Gregory J Stagaman, Dallas, TX (US);
Assignee:
SGS-THOMSON Microelectronics, Inc., Carrollton, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 72 ; 355 53 ; 355 55 ; 355 47 ;
Abstract
An adaptive wafer modulator in a photolithography device is described. A focal pattern of a lithographic system is calibrated. Prior to exposing a wafer surface to a selected image pattern, the wafer surface is elastically bent or modulated by actuating a set of adjustable pins supporting the wafer so that the wafer surface being exposed conforms more closely to the calibrated focal pattern of the lithographic system than to the presumed flat focal plane of the lithographic system.