The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 1996
Filed:
Dec. 27, 1994
Shigeru Yamasaki, Saitama-ken, JP;
Masafumi Sueyoshi, Kanagawa-ken, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An interferometric distance measuring interferometer comprises a light source (11) for irradiating a main light beam (L), a beam splitting member (56) for splitting the main light beam into a first light beam (MR1, MR2) and a second light beam (MM1, MM2), a first reflection member (28) and second reflection member (14) for reflecting the first light beam and the second light beam, respectively, an optical composition member (25) for compositing the first light beam reflected by the first reflection member (28) and the second light beam reflected by the second reflection member (14), and a photoelectric converter (19) for receiving the composited light beam from the optical composition member. Whereby, a relative displacement between the first reflection member (28) and the second reflection member (14) is detected based on a photoelectric conversion signal from the photoelectric converter (19). The apparatus according to the present invention further comprises an asymmetric conversion member (12) for establishing the optical intensity distribution of a cross-section of at least one beam selected from a group of light beams including the main light beam (L) irradiated from the light source (11), the first light beam (MR1, MR2) and the second light beam (MM1, MM2). The asymmetric conversion member is arranged at at least one portion on an optical path of the light beam between the light source (11) and the photoelectric converter (19).
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