The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 1996
Filed:
Oct. 11, 1994
Tadashi Sakon, Kawasaki, JP;
Kenichi Uemura, Sagamihara, JP;
Yoshihiro Mori, Sagamihara, JP;
Kengo Shimanoe, Sagamihara, JP;
Susumu Ohtsuka, Sagamihara, JP;
Shuji Munehira, Tokyo, JP;
Nippon Steel Corporation, Tokyo, JP;
NSC Electron Corporation, Tokyo, JP;
Abstract
A cleaning solution for achieving highly accurate cleaning of silicon semiconductors and silicon oxides. The solution which enables a great reduction in the metal contaminants and the number of fine particles adhered on the surfaces and retention of the hydrophilic property of the surfaces to prevent the surfaces from being unstable, comprising an aqueous acidic solution containing 0.005% by weight or more to less than 0.05% by weight hydrogen fluoride and 0.3% by weight or more to 20.0% by weight or less hydrogen peroxide and having a pH in the range from 1 or more to less than 5.