The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 1996
Filed:
May. 24, 1995
Leybold Aktiengesellschaft, Hanau, DE;
Abstract
A substrate carrier plate (17, 17a) designed to hold at least one substrate is removably attached to a support element (19, 19a) of a base (2). The carrier plate is held to the support element (19, 19a) at least at one point by a centering pin (22, 23; 22a, 23a), which projects from the plate of the support element (19) and fits into a hole (24, 25) in the substrate carrier plate (17), and at least at one other point by a clamping device (18, 18a). The clamping device (18, 18a) is held on a control part (11) on the base (2) in such a way that it can be moved by the displacement of an actuating arm (21) between a clamping position and a release position, and it is also provided with a tensioning roller (14), which is supported on a ramp (15, 15a) on the substrate carrier plate (17). The substrate carrier plate (17) has an opening (20, 20a) to allow the passage of the tensioning roller (14), the tensioning roller (14, 14a) being located behind this opening when in its release position. A kickover spring (9) holds the tensioning rollers (14, 14a) under pretension in one stable position when in the tensioning position and under pretension in another stable position when in the release position.