The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 1996
Filed:
May. 31, 1995
Cheng P Wen, Mission Viejo, CA (US);
Randy K Rolph, Palos Verdes Estates, CA (US);
Timothy T Zielinski, Torrance, CA (US);
Hughes Aircraft Company, Los Angeles, CA (US);
Abstract
A cone-shaped bubbler for use with solid metal organic source material used in metal organic chemical vapor phase deposition systems, and a method of producing carrying gas saturated with source material that is injected into such systems. The bubbler comprises a sealed container having a slanted wall with an inverted cone-shaped cross section. Solid metal organic source material is disposed in the container. A heat bath surrounds the sealed container. A carrying gas inlet is disposed adjacent the top of the container. Carrying gas is injected in a tangential direction relative to the source material, and a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules, pushing the source material against the wall to promote heat flow from the heat bath to sustain high rate sublimation. A gas outlet is disposed adjacent the bottom of the container. Once source material lining the slanted inner wall is removed, gravitational forces cause source material to refill the empty space, reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler. The method comprises providing a sealed container with a slanted wall having an inverted cone-shaped cross section, disposing solid metal organic source material in the container, heating the sealed container, injecting a carrying gas adjacent the top of the container so that carrying gas is injected in a tangential direction relative to the solid source material, and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the container.