The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 1996
Filed:
Jan. 17, 1995
Dirk Goossens, Sint Niklaas, BE;
Herman J Boeglin, South Meriden, CT (US);
Olin Corporation, Cheshire, CT (US);
Abstract
Liquid chemical supply ampules, commonly called 'bubblers', which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks.