The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 1996
Filed:
Jun. 07, 1995
Applicant:
Inventors:
Nunzio DiPaolo, Poughkeepsie, NY (US);
Daniel J Ferguson, Marlboro, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27B / ;
U.S. Cl.
CPC ...
219390 ; 219385 ; 219407 ; 432-9 ;
Abstract
An apparatus for contamination-free treating semiconductor parts in a furnace. A carrier into which the semiconductor parts are placed has a cover placed over the carrier to form a boat enveloping the parts while the parts are treated in a furnace. The boat preserves an environment less contaminated than the furnace interior, and may have heating elements embedded in the carrier or cover.