The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 1996
Filed:
Mar. 24, 1995
Hiroshi Kitajima, Tokyo, JP;
Hidemitsu Aoki, Tokyo, JP;
Haruto Hamano, Tokyo, JP;
Makoto Morita, Tokyo, JP;
Yoshimi Shiramizu, Tokyo, JP;
Masaharu Nakamori, Tokyo, JP;
Kaori Watanabe, Tokyo, JP;
Hirofumi Seo, Tokyo, JP;
Yuji Shimizu, Tokyo, JP;
Makoto Iuchi, Tokyo, JP;
Yasushi Sasaki, Tokyo, JP;
Nahomi Ohta, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.