The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 1996
Filed:
Dec. 20, 1994
Kazutoshi Motosugi, Tama, JP;
Nikon Corporation, Tokyo, JP;
Nikon Engineering Co., Ltd., Yokohama, JP;
Abstract
An apparatus for measuring a three-dimensional shape of an object to be measured provided with a fitting portion, comprises: a body base; a rotation stage set on the base; an XY stage set on the rotation stage and provided with a fitting portion, the XY stage being movable in a predetermined horizontal direction and in a horizontal direction perpendicular thereto independently of rotation of the rotation stage; a drive control device for independently driving and controlling the rotation stage and XY stage; a holding device for holding the object to be measured, the holding device being provided with a fit portion to fit with the fitting portion of the XY stage, and a fit portion to fit with the fitting portion of the object to be measured; an R stage set above the holding device, the R stage being movable in a horizontal direction and in a direction of the diameter of the rotation stage; a first optical displacement gage provided on a lower surface of the R stage so that an optical axis thereof becomes parallel to a rotational axis of the rotation stage; a Z stage provided beside the holding device, the Z stage being movable in a direction parallel to the rotational axis; and a second optical displacement gage provided on a side surface of the Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of the rotation stage.