The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 1996

Filed:

Sep. 23, 1994
Applicant:
Inventors:

Vladimir Kupershmidt, Pleasanton, CA (US);

Mikhail Kouchnir, Palo Alto, CA (US);

Robert Petersen, Dublin, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J / ;
U.S. Cl.
CPC ...
356368 ; 356369 ;
Abstract

A method and apparatus for analyzing a sample wherein at least two orthogonally polarized, intensity and phase modulated laser beams with different wavelengths and frequencies of intensity and phase modulation are directed onto the sample, and the signals derived from the laser beams which interact with the sample are synchronously demodulated to determine characteristics of the sample such as index of refraction, absorption coefficient and film thickness. A reference beam can be provided to correct for noise and drift.


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