The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1996
Filed:
Nov. 08, 1995
Applicant:
Inventors:
Yasuhiro Shimada, Atsugi, JP;
Yoshimasa Okamura, Tokyo, JP;
Osamu Takamatsu, Atsugi, JP;
Masaru Nakayama, Atsugi, JP;
Yoshihiro Yanagisawa, Isehara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G11B / ;
U.S. Cl.
CPC ...
369126 ; 250306 ; 1566311 ; 1566471 ; 437228 ;
Abstract
After a recessed portion 2 is formed in a first substrate made of single crystal silicon by crystal axis anisotropic etching, a peeling layer and a material of a fine tip which may be a noble metal or a noble metal alloy are formed. A second substrate is joined to the fine tip, and peeling is performed on the peeling layer, whereby the fine tip is formed on the second substrate.