The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1996
Filed:
Oct. 17, 1995
Applicant:
Inventor:
Shigenori Ohi, Omiya, JP;
Assignee:
Fuji Photo Optical Co., Ltd., Omiya, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ;
U.S. Cl.
CPC ...
356348 ; 356359 ; 356363 ; 2502 / ;
Abstract
A holographic interferometry apparatus for inspecting cylindrical optical surfaces. Laser light is split into regular reflection light and diffraction light by a holographic optical element. A reference reflector plate receives the regular reflection light. An object with a cylindrical optical surface receives the diffraction light. The object is held on a specimen holder table which has a four-axis adjustment mechanism which allows adjustments in the X,Y,Z and .theta. directions. Interference fringes are formed by the interference of light reflected from the object and from the reflector plate.