The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1996
Filed:
May. 19, 1995
Applicant:
Inventors:
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437 41 ; 437200 ; 437241 ;
Abstract
A metal-semiconductor compound (72, 74, 76) is formed after a step that introduces nitrogen into regions (52, 54, 56) of the device (100). In one embodiment, a nitrogen-containing gas is exposed to surfaces (42, 44, 46) before forming a titanium layer (62) is deposited. A one-step anneal is performed to form titanium disilicide regions (72, 72, 76) that are in the C54 phase without thermal agglomeration or forming electrical shorts between the titanium disilicide regions (72, 74, 76).