The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 1996
Filed:
Jul. 25, 1995
Applicant:
Inventors:
Robert J Soave, Cortland, NY (US);
Alan M Then, Auburn, MA (US);
Steven M Shank, Ithaca, NY (US);
G William Tasker, West Brookfield, MA (US);
Assignee:
Galileo Electro-Optics Corporation, Sturbridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C03C / ; H01L / ;
U.S. Cl.
CPC ...
216-2 ; 216 56 ; 216 66 ; 1566431 ; 1566441 ; 1566571 ; 205655 ;
Abstract
Manufacture of a microchannel plate may be improved using photoelectrochemical etching and thin film activation such as CVD and nitriding and oxidizing wall surface portions of pores formed in the substrate. The pore pattern may be changed by oxidizing and etching the substrate prior to activation.