The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 1996
Filed:
Apr. 15, 1994
Peter F Ebbing, Los Altos, CA (US);
Kien N Chuc, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus for generating dry vapor includes a manifold assembly with a channel for conveying a liquid from a liquid source. A vessel for holding the liquid is secured to the manifold assembly and includes a fill tube connected to receive liquid from the manifold assembly's channel. A heater is provided for heating the liquid in the vessel to generate a vapor. A settling chamber is located within the vessel above the liquid in the vessel from settling out liquid drops in the vapor. The settling chamber includes a vapor inlet with a cross-section that is substantially smaller than the vessel's cross-section for receiving vapor. A vapor outlet removes dry vapor from the settling chamber.