The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 1996
Filed:
Jan. 11, 1995
Bernard Drevillon, Meudon, FR;
Jean-Yves Parey, la Ville du Bois, FR;
Razvigor Ossikovski, Palaiseau Cedex, FR;
Centre National de la Recherche, Paris, FR;
Abstract
This invention concerns a spectroscopic ellipsometer modulated at a frequency (.omega..sub.m) intended for taking measurements of a sample (3). The spectroscopic ellipsometer is phase modulated, the sample being excited by external means (16) producing periodic, alternating excitation at a frequency (.OMEGA..sub.e). The measurement contains the ellipsometric parameter values (.psi., .DELTA.) of the sample, respectively in the presence of (.psi..sub.1, .DELTA..sub.1) and in the absence of (.psi..sub.2, .DELTA..sub.2) excitation of the sample, as a function of excitation frequency (.OMEGA..sub.e).