The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 1996
Filed:
Jun. 14, 1993
Sadao Shimoyashiro, Fujisawa, JP;
Takemasa Iwasaki, Yokohama, JP;
Hiroyuki Kawaji, Yokohama, JP;
Toyohide Hamada, Yokohama, JP;
Minoru Ikeda, Yokohama, JP;
Hiroshi Kikuchi, Hiratsuka, JP;
Hiroto Nagatomo, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.