The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 1996
Filed:
Mar. 07, 1994
Applicant:
Inventors:
Peter G Borden, San Mateo, CA (US);
Derek G Aqui, San Jose, CA (US);
Matt A Evanko, Placitas, NM (US);
Assignee:
High Yield Technology, Inc., Sunnyvale, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
250574 ; 356338 ;
Abstract
A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.